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基于mems陀螺的惯性测量,摘要基于mems (micro electronic mechanical system, 微电子机械系统)惯性传感器的惯性测量单元(inertial measurement unit,imu)以形状尺寸小、寿命长、耐冲击和可靠性高等特征，在航空航天、精密仪器仪表、生物医疗等领域有着广阔的应用潜力，并受到世界各国的高度...
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摘 要
基于MEMS (Micro Electronic Mechanical System, 微电子机械系统)惯性传感器的惯性测量单元(Inertial Measurement Unit,IMU)以形状尺寸小、寿命长、耐冲击和可靠性高等特征，在航空航天、精密仪器仪表、生物医疗等领域有着广阔的应用潜力，并受到世界各国的高度重视，而且已经被列为21世纪惯性技术的关键技术之一。本论文围绕MEMS陀螺的测试、惯性测量单元的标定和陀螺随机模型的研究以及一种姿态测量系统进行了研究。
随着MEMS技术的不断成熟，MEMS陀螺有替代中低精度的光纤陀螺的趋势，论文中首先对STIM202陀螺进行性能测试，主要包括比例因子、比例因子非线性、零偏、零偏稳定性和零偏重复性。然后对基于高精度的STIM202陀螺的惯性测量单元进行标定，由于MEMS陀螺温度效应比较明显，一种有效的温度补偿措施显得尤为重要。本文给出了陀螺和加速度计的误差模型，在-40℃～+70℃温度区间内，采用陀螺和加速度计同时标定的方法对惯性测量单元标定，在不失精度的情况下节省了大量的标定时间，为批量化生产奠定基础。
MEMS陀螺的随机噪声严重的影响了陀螺的精度，其噪声项主要有：量化噪声、角度随机游走、偏值不稳定性、速率随机游走和速率斜坡。本文首先采用Allan方差法分析陀螺噪声源，评估陀螺的性能，然后在建立时间序列模型的基础上设计了卡尔曼滤波器，通过卡尔曼滤波验证了采用此模型能够较好的滤除噪声，最后再通过Allan方差法分析滤波后的陀螺噪声源。
在臔@凳笛橹校ü怪蓖勇菀�(Vertical Gyroscope,VG)与激光惯性组合导航系统的对比试验，表明垂直陀螺仪可达到一定的精度，满足了在中低精度领域的应用。最后对全文的工作进行了总结、并就今后的研究工作内容作了展望。
关键词：微机械；惯性测量单元；标定；随机模型；垂直陀螺仪
Abstract
In aerospace, precision instruments, biology, medical care and other fields,the inertial measurement unit(IMU) based on MEMS(Micro Electronic Mechanical System) inertial sensor have broad application potential with the characteristics of small size,long service life,impact resistance and high reliability.Many countries pay high attention to it,and it is listed as one of the critical technologies of inertia in the 21st century.The research content are testing of MEMS gyro,calibration of the inertial measurement unit and research on gyro random model and a kind of attitude measuring system in this paper.
As MEMS technology continues to mature,MEMS gyro have the tendency to replace low or intermediate precision of fiber optic gyro.The performance of STIM202 gyro is firstly tested in this paper,the performance mainly include scaling factor, scaling factor nonlinear, zero drift,zero drift stability and zero drift repeatability.And then, the inertial measurement unit based on high precision STIM202 gyro is calibrated.A kind of effective temperature compensating measures significant particularly important,because of the temperature effect of MEMS gyro is quite obvious.The error model of gyro and accelerometer is defined in this paper,in the temperature range from -40℃to70℃,the calibration of gyro and accelerometer are done at the same time while calibrating the inertial measurement unit,the method can save a lot of time without losing the accuracy and make mass production to become possible.
The random noise of MEMS gyro seriously influence the gyro's accuracy,the main noise are quantization noise,angle random-walking,drift instability,rate random-walking and rate slope. Firstly,the noise source are analysised with the methods of Allan variance to eva luate the performance of the gyro, and then the kalman filter is designed based on the time series model established,and this model can effectively filter the noise through using the kalman filter, Finally,the filtered gyro noise source are analysised with the methods of Allan variance.
In the experiment of driving car,the contrast test of vertical gyroscope and laser inertial navigation system show that the vertical gyroscope can attain the certain accuracy and can meet the low precision areas of application.Finally,the full work of the paper is summarized and the future research content on this subject is made predicted.
Key words:MEMS;IMU;Calibration; Random Model ;VG
目 录
摘 要 I
Abstract III
第1章 绪论 1
1.1 课题研究的背景和意义 1
1.2 惯性测量单元国内外发展状况 5
1.3 本课题的主要研究内容 8
第2章 MEMS惯性仪表及性能指标 10
2.1 MEMS陀螺仪的分类及原理 10
2.1.1 MEMS陀螺仪的分类 10
2.1.2 MEMS陀螺仪的原理 11
2.1.3 MEMS陀螺仪的结构 12
2.2 MEMS陀螺性能指标 13
2.2.1 陀螺仪标度因数 13
2.2.2 阈值和分辨率 14
2.2.3 最大输入角速率 14
2.2.4 零偏 14
2.2.5 随机游走系数 14
2.2.6 带宽 14
2.2.7 STIM202陀螺仪 14
2.3 MEMS加速度计 15
2.3.1 微机械电容式加速度 15
2.3.2 MS8000系列加速度计 17
2.4 本章小结 18
第3章 MEMS陀螺的测试与惯性测量单元的标定 19
3.1 MEMS陀螺主要性能指标测试 19
3.1.1 MEMS陀螺标度因数测试 19
3.1.2 MEMS陀螺标度因数非线性测试 20
3.1.3 MEMS陀螺零偏测试 20
3.1.4 MEMS陀螺零偏稳定性测试 21
3.1.5 MEMS陀螺零偏重复性测试 21
3.2 STIM202的..
基于MEMS (Micro Electronic Mechanical System, 微电子机械系统)惯性传感器的惯性测量单元(Inertial Measurement Unit,IMU)以形状尺寸小、寿命长、耐冲击和可靠性高等特征，在航空航天、精密仪器仪表、生物医疗等领域有着广阔的应用潜力，并受到世界各国的高度重视，而且已经被列为21世纪惯性技术的关键技术之一。本论文围绕MEMS陀螺的测试、惯性测量单元的标定和陀螺随机模型的研究以及一种姿态测量系统进行了研究。
随着MEMS技术的不断成熟，MEMS陀螺有替代中低精度的光纤陀螺的趋势，论文中首先对STIM202陀螺进行性能测试，主要包括比例因子、比例因子非线性、零偏、零偏稳定性和零偏重复性。然后对基于高精度的STIM202陀螺的惯性测量单元进行标定，由于MEMS陀螺温度效应比较明显，一种有效的温度补偿措施显得尤为重要。本文给出了陀螺和加速度计的误差模型，在-40℃～+70℃温度区间内，采用陀螺和加速度计同时标定的方法对惯性测量单元标定，在不失精度的情况下节省了大量的标定时间，为批量化生产奠定基础。
MEMS陀螺的随机噪声严重的影响了陀螺的精度，其噪声项主要有：量化噪声、角度随机游走、偏值不稳定性、速率随机游走和速率斜坡。本文首先采用Allan方差法分析陀螺噪声源，评估陀螺的性能，然后在建立时间序列模型的基础上设计了卡尔曼滤波器，通过卡尔曼滤波验证了采用此模型能够较好的滤除噪声，最后再通过Allan方差法分析滤波后的陀螺噪声源。
在臔@凳笛橹校ü怪蓖勇菀�(Vertical Gyroscope,VG)与激光惯性组合导航系统的对比试验，表明垂直陀螺仪可达到一定的精度，满足了在中低精度领域的应用。最后对全文的工作进行了总结、并就今后的研究工作内容作了展望。
关键词：微机械；惯性测量单元；标定；随机模型；垂直陀螺仪
Abstract
In aerospace, precision instruments, biology, medical care and other fields,the inertial measurement unit(IMU) based on MEMS(Micro Electronic Mechanical System) inertial sensor have broad application potential with the characteristics of small size,long service life,impact resistance and high reliability.Many countries pay high attention to it,and it is listed as one of the critical technologies of inertia in the 21st century.The research content are testing of MEMS gyro,calibration of the inertial measurement unit and research on gyro random model and a kind of attitude measuring system in this paper.
As MEMS technology continues to mature,MEMS gyro have the tendency to replace low or intermediate precision of fiber optic gyro.The performance of STIM202 gyro is firstly tested in this paper,the performance mainly include scaling factor, scaling factor nonlinear, zero drift,zero drift stability and zero drift repeatability.And then, the inertial measurement unit based on high precision STIM202 gyro is calibrated.A kind of effective temperature compensating measures significant particularly important,because of the temperature effect of MEMS gyro is quite obvious.The error model of gyro and accelerometer is defined in this paper,in the temperature range from -40℃to70℃,the calibration of gyro and accelerometer are done at the same time while calibrating the inertial measurement unit,the method can save a lot of time without losing the accuracy and make mass production to become possible.
The random noise of MEMS gyro seriously influence the gyro's accuracy,the main noise are quantization noise,angle random-walking,drift instability,rate random-walking and rate slope. Firstly,the noise source are analysised with the methods of Allan variance to eva luate the performance of the gyro, and then the kalman filter is designed based on the time series model established,and this model can effectively filter the noise through using the kalman filter, Finally,the filtered gyro noise source are analysised with the methods of Allan variance.
In the experiment of driving car,the contrast test of vertical gyroscope and laser inertial navigation system show that the vertical gyroscope can attain the certain accuracy and can meet the low precision areas of application.Finally,the full work of the paper is summarized and the future research content on this subject is made predicted.
Key words:MEMS;IMU;Calibration; Random Model ;VG
目 录
摘 要 I
Abstract III
第1章 绪论 1
1.1 课题研究的背景和意义 1
1.2 惯性测量单元国内外发展状况 5
1.3 本课题的主要研究内容 8
第2章 MEMS惯性仪表及性能指标 10
2.1 MEMS陀螺仪的分类及原理 10
2.1.1 MEMS陀螺仪的分类 10
2.1.2 MEMS陀螺仪的原理 11
2.1.3 MEMS陀螺仪的结构 12
2.2 MEMS陀螺性能指标 13
2.2.1 陀螺仪标度因数 13
2.2.2 阈值和分辨率 14
2.2.3 最大输入角速率 14
2.2.4 零偏 14
2.2.5 随机游走系数 14
2.2.6 带宽 14
2.2.7 STIM202陀螺仪 14
2.3 MEMS加速度计 15
2.3.1 微机械电容式加速度 15
2.3.2 MS8000系列加速度计 17
2.4 本章小结 18
第3章 MEMS陀螺的测试与惯性测量单元的标定 19
3.1 MEMS陀螺主要性能指标测试 19
3.1.1 MEMS陀螺标度因数测试 19
3.1.2 MEMS陀螺标度因数非线性测试 20
3.1.3 MEMS陀螺零偏测试 20
3.1.4 MEMS陀螺零偏稳定性测试 21
3.1.5 MEMS陀螺零偏重复性测试 21
3.2 STIM202的..
