浅议微机械元件和仪器新进展.doc
约6页DOC格式手机打开展开
浅议微机械元件和仪器新进展,本文共计6页，4395字；new progress of mems component and instrument[abstract]： mems component and instrument are suitable for batch manufacture and have the...
内容介绍
此文档由会员 霜天盈月 发布
浅议微机械元件和仪器新进展
本文共计6页，4395字；
New Progress of MEMS Component and Instrument
[Abstract]： MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research,development and marketing of this field, which suggests a bright future.
[关键词]: 微机械元件,微机械仪器,多功能绝对压力传感器,医用压力传感器,加速度传感器,CMOS传感器、微机械电泳仪、微机械质谱仪、微机械细胞计、微机械染色体链成反应仪、微机械重金属探测仪、微机械血液测试仪。
[摘要] :微机械元件和微机械仪器，适于大批量生产，具有成本低廉、性能优良和体积微小及集成度高的特点，近十年来，研制、开发及市场扩大方面取得了巨大的进展，展现了美好的前景。
目录：
[正文]：
一、前言
二、微机械元件
（一） 微机械元件应用
(二)、市场预测
三、微机械仪器
四、结论
部分参考文献
1. J. Bryzek, Impact of MEMS technology on society, Sensors and Actuators A 56 (1996), 1~9
2. J. Bryzek, New generation of disposable blood pressure sensors, Proc. Sensors Expro, Detroit, MI, USA. 1987
3. J. Bryzek, etc., Silicon sensors and micro structures in health care industry, Proc. Sensors, Expro,
4. W. Kuchuel, A surface machined silicon accelerometer with on-chip detection circuitry, Sensory and Actuators, A, 45(1994),7-16
5. BIS Strategic Decision: Automotive components forecast II: Sensors market study, 1993.
本文共计6页，4395字；
New Progress of MEMS Component and Instrument
[Abstract]： MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research,development and marketing of this field, which suggests a bright future.
[关键词]: 微机械元件,微机械仪器,多功能绝对压力传感器,医用压力传感器,加速度传感器,CMOS传感器、微机械电泳仪、微机械质谱仪、微机械细胞计、微机械染色体链成反应仪、微机械重金属探测仪、微机械血液测试仪。
[摘要] :微机械元件和微机械仪器，适于大批量生产，具有成本低廉、性能优良和体积微小及集成度高的特点，近十年来，研制、开发及市场扩大方面取得了巨大的进展，展现了美好的前景。
目录：
[正文]：
一、前言
二、微机械元件
（一） 微机械元件应用
(二)、市场预测
三、微机械仪器
四、结论
部分参考文献
1. J. Bryzek, Impact of MEMS technology on society, Sensors and Actuators A 56 (1996), 1~9
2. J. Bryzek, New generation of disposable blood pressure sensors, Proc. Sensors Expro, Detroit, MI, USA. 1987
3. J. Bryzek, etc., Silicon sensors and micro structures in health care industry, Proc. Sensors, Expro,
4. W. Kuchuel, A surface machined silicon accelerometer with on-chip detection circuitry, Sensory and Actuators, A, 45(1994),7-16
5. BIS Strategic Decision: Automotive components forecast II: Sensors market study, 1993.
