光干涉法在角度测量中的应用.doc

光干涉法在角度测量中的应用
Application of the Optical Interference Method
in Angle Measurement


摘 要：利用光学方法测量角度是一种有效的角度测量方法，光学测角法具有可调节、高精度的特点。本论文详细介绍了其中基于光学干涉原理的高精度光干涉测角法，总结了光干涉法在小角度测量、大角度测量、旋转角度测量中的应用，分析了每种方法的优点和局限性，最后指出了利用光干涉法测量角度未来的发展前景。
关键词：干涉法，角度测量，小角度，大角度，旋转角度


Application of the Optical Interference Method
in Angle Measurement
Abstract : The optical angle measuring is an effective method to measure an angle, it is adjustable and has the characteristics of high precision. This paper introduces the optical interference measuring method in details, which is based on the principle of optical interference and has the highest precision. In this paper, the application of optical interference measuring method in small or big angle measurement and in the rotation angle measurement has been summarized. Also in the paper advantages and limitations of each method are analyzed. At last, the future prospects of angle measurement by optical interference method are pointed out.

Keywords : optical interference method , angle measurement , small angle , large angle, rotation angle