光干涉法在长度测量中的应用.doc
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光干涉法在长度测量中的应用,摘 要： 基于光的干涉原理进行长度测量，具有操作简单，灵敏度高，非接触测量等优点。本文针对光干涉法长度测量中应用广泛的迈克尔逊干涉仪，外差干涉仪，f-p干涉仪，光纤干涉仪，分别介绍了它们的测量原理，分析了每种方法的优点和局限性，并对光干涉法测量长度进行了展望。近年来,国内外开展了大量研究，并进...
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光干涉法在长度测量中的应用
摘 要： 基于光的干涉原理进行长度测量，具有操作简单，灵敏度高，非接触测量等优点。本文针对光干涉法长度测量中应用广泛的迈克尔逊干涉仪，外差干涉仪，F-P干涉仪，光纤干涉仪，分别介绍了它们的测量原理，分析了每种方法的优点和局限性，并对光干涉法测量长度进行了展望。近年来,国内外开展了大量研究，并进一步提高干涉法的测量精度、提高系统的可靠性、抗干扰能力。干涉测长系统的应用将会更加广泛.
关键词：光的干涉，长度测量
Application of Optical Interference Method
in Length Measurement
Abstract: The length measurement based on the light interference theory has the advantages of simple operation, high sensitivity, non-contact measurement, etc. Interferometers such as Michelson interferometer, heterodyne interferometer, F-P interferometer, optical fiber interferometer are widely used in length measurement. In this paper, their measuring principles, the advantages and limitations of each method are introduced respectively. Additionally, the future prospects of length measurement by optical interference method are pointed out. In recent years, domestic and foreign researches a lot, and further improve the measurement accuracy, interference method to improve system reliability, anti interference ability. Application of interferometric length measurement system will be more widely.
Keywords：interference of light ，length measurement
摘 要： 基于光的干涉原理进行长度测量，具有操作简单，灵敏度高，非接触测量等优点。本文针对光干涉法长度测量中应用广泛的迈克尔逊干涉仪，外差干涉仪，F-P干涉仪，光纤干涉仪，分别介绍了它们的测量原理，分析了每种方法的优点和局限性，并对光干涉法测量长度进行了展望。近年来,国内外开展了大量研究，并进一步提高干涉法的测量精度、提高系统的可靠性、抗干扰能力。干涉测长系统的应用将会更加广泛.
关键词：光的干涉，长度测量
Application of Optical Interference Method
in Length Measurement
Abstract: The length measurement based on the light interference theory has the advantages of simple operation, high sensitivity, non-contact measurement, etc. Interferometers such as Michelson interferometer, heterodyne interferometer, F-P interferometer, optical fiber interferometer are widely used in length measurement. In this paper, their measuring principles, the advantages and limitations of each method are introduced respectively. Additionally, the future prospects of length measurement by optical interference method are pointed out. In recent years, domestic and foreign researches a lot, and further improve the measurement accuracy, interference method to improve system reliability, anti interference ability. Application of interferometric length measurement system will be more widely.
Keywords：interference of light ，length measurement
