基于opengl的真空机器人三维图形仿真{外文翻译}.rar
基于opengl的真空机器人三维图形仿真{外文翻译},基于opengl的真空机器人三维图形仿真{外文翻译}包含中文翻译和英文原文，内容详细完整，建议下载参考！中文： 3260 字英文： 10455 字符摘要：真空机器人是先进半导体制造行业中不可缺少的重要设备之一，本文介绍了一种并联型真空机器人的运动学模型，以及利用opengl和stl格式文件在visual c++ 6.0...
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基于OpenGL的真空机器人三维图形仿真{外文翻译}
包含中文翻译和英文原文，内容详细完整，建议下载参考！
中文： 3260 字
英文： 10455 字符
摘要：真空机器人是先进半导体制造行业中不可缺少的重要设备之一，本文介绍了一种并联型真空机器人的运动学模型，以及利用OpenGL和STL格式文件在Visual c++ 6.0程序界面中实现3D图形仿真的方法，取得了良好的实验效果，为进一步实现上位机实时在线监控奠定了基础。
关键词：真空机器人；并联机器人；OpenGL；STL；Visual C++ 6.0
1 引言
随着半导体制造技术的进步，集成电路的集成度不断提高，半导体器件的加工必须在高度洁净的环境中进行，利用小型真空室可满足这一要求。为了保持真空室的洁净度，需要采用机器人代替人工操作。如果将机器人、晶圆盒与所有制程机台集中合并为一台生产设备，不仅减小了占地面积．且缩短了工艺流程，进一步提高了产率与产品质量。这种设备称为集束型制程设备(Cluster Tools)。所谓真空机器人就是在集束型制程设备的各个制程机台之间，对半导体材料进行取出、搬运和装入等操作的机械装置。由于无法直接观察密闭真空腔室中的机器人动作，必须在上位机监控界面中实时再现其运行状态。因此需要对机器人进行3D仿真建模。
常压环境下的工业机器人以多自由度串联型为主．转动轴数目与部件数目基本一致。按照一般的建模方法．首先通过矩阵乘法求出各部件的转动轴坐标系相对于固定坐标系的变换 ......
Implementation of3D graphical simulation for vacuumrobotbased on Open GL
Abstract: Vacuum robot is an essential device in advanced semiconductor manufacturing. This paper introduces the kinematic modeling of a kind of parallel vacuum robot and the implementation of 3D graphical simulation based on OpenGL and STL files in Visual C++ program interface, which also lays the foundation of real-time online monitoring of the robot.
Key word: vacuum robot, parallel robot, OpenGL, STL, Visual C++ 6.0
Sort number of Chinese Library: TP391.9 Literature identification code: B
1 Introduction
With the improvement of semiconductor manufacturing，the requirement for high integration of IC circuit is increasing，so it is necessary to process semiconductor components in a highly Clean environment，which can be offered by miniature vacuum room．To maintain the cleanness，manual work has to be replaced by robots．Cluster tool，namely the equipment combined by robot，vacuum Chamber，wafer cassettes and process modules，has the virtue of reducing space，curtailing manufacturing progress，and improving efficiency and．quality．Vacuum robot，as it is，the mechanical device to pick，move and place semiconductor wafers among process modules of the cluster tool, Because the movement of robot in the sealed vacuum chamber cannot be directly observed，its operation has to be displayed real-timely on the monitor of cluster tool controller．Therefor6 it is necessary to implement the 3D graphical simulation for the robot ......
包含中文翻译和英文原文，内容详细完整，建议下载参考！
中文： 3260 字
英文： 10455 字符
摘要：真空机器人是先进半导体制造行业中不可缺少的重要设备之一，本文介绍了一种并联型真空机器人的运动学模型，以及利用OpenGL和STL格式文件在Visual c++ 6.0程序界面中实现3D图形仿真的方法，取得了良好的实验效果，为进一步实现上位机实时在线监控奠定了基础。
关键词：真空机器人；并联机器人；OpenGL；STL；Visual C++ 6.0
1 引言
随着半导体制造技术的进步，集成电路的集成度不断提高，半导体器件的加工必须在高度洁净的环境中进行，利用小型真空室可满足这一要求。为了保持真空室的洁净度，需要采用机器人代替人工操作。如果将机器人、晶圆盒与所有制程机台集中合并为一台生产设备，不仅减小了占地面积．且缩短了工艺流程，进一步提高了产率与产品质量。这种设备称为集束型制程设备(Cluster Tools)。所谓真空机器人就是在集束型制程设备的各个制程机台之间，对半导体材料进行取出、搬运和装入等操作的机械装置。由于无法直接观察密闭真空腔室中的机器人动作，必须在上位机监控界面中实时再现其运行状态。因此需要对机器人进行3D仿真建模。
常压环境下的工业机器人以多自由度串联型为主．转动轴数目与部件数目基本一致。按照一般的建模方法．首先通过矩阵乘法求出各部件的转动轴坐标系相对于固定坐标系的变换 ......
Implementation of3D graphical simulation for vacuumrobotbased on Open GL
Abstract: Vacuum robot is an essential device in advanced semiconductor manufacturing. This paper introduces the kinematic modeling of a kind of parallel vacuum robot and the implementation of 3D graphical simulation based on OpenGL and STL files in Visual C++ program interface, which also lays the foundation of real-time online monitoring of the robot.
Key word: vacuum robot, parallel robot, OpenGL, STL, Visual C++ 6.0
Sort number of Chinese Library: TP391.9 Literature identification code: B
1 Introduction
With the improvement of semiconductor manufacturing，the requirement for high integration of IC circuit is increasing，so it is necessary to process semiconductor components in a highly Clean environment，which can be offered by miniature vacuum room．To maintain the cleanness，manual work has to be replaced by robots．Cluster tool，namely the equipment combined by robot，vacuum Chamber，wafer cassettes and process modules，has the virtue of reducing space，curtailing manufacturing progress，and improving efficiency and．quality．Vacuum robot，as it is，the mechanical device to pick，move and place semiconductor wafers among process modules of the cluster tool, Because the movement of robot in the sealed vacuum chamber cannot be directly observed，its operation has to be displayed real-timely on the monitor of cluster tool controller．Therefor6 it is necessary to implement the 3D graphical simulation for the robot ......
