机械精密定位系统的研究与设计（本科毕业论文设计）.doc
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机械精密定位系统的研究与设计（本科毕业论文设计）,摘要设计了一种大行程精密工作台定位控制系统。提出用直线音圈电机粗动控制与压电陶瓷精动控制相结合的方法来完成对工作台的定位控制，利用衍射干涉光栅技术进行实时检测，实现定位机构的全闭环反馈控制，最后由计算机完成系统总体控制。该课题所研究的精密定位系统（硬件部分）由四部分组成:...
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机械精密定位系统的研究与设计（本科毕业论文设计）
摘 要
设计了一种大行程精密工作台定位控制系统。提出用直线音圈电机粗动控制与压电陶瓷精动控制相结合的方法来完成对工作台的定位控制，利用衍射干涉光栅技术进行实时检测，实现定位机构的全闭环反馈控制，最后由计算机完成系统总体控制。该课题所研究的精密定位系统（硬件部分）由四部分组成:光路系统、定位台与驱动机构、光电检测电路、运算控制设备。在提出系统方案的基础上，重点构建了控制系统的软件界面和基础硬件控制系统即PLC控制系统。运用Borland C++ Builder 6.0作为开发工具开发出了系统工作的控制界面。设备底层硬件控制的语言程序为PLC控制程序，高层语言程序选用C语言，而这需要在计算机上编写基本的程序实现C语言与PLC进行通信，来调用PLC控制程序实现对步进电机的运动控制，即用C语言程序编写程序与PLC通信。基于激光莫尔信号的精密定位装置可获得比较高定位精度，对精密加工等工程领域具有重要的实用价值最后,本文分析介绍了课题进一步的研究方向。
类键词: 工作台，精密定位，莫尔信号, 粗动台，微动台
ABSTRACT
This paper presents a system for long-work range Precisely positioning of the worktable. In the system ,the combination of Linear voice coil actuator for coarse adjusting and the PZT for fine adjusting is applied in positioning of the worktable while the diffraction interfere grating technique is utilized for the feedback of the positional signal real time. That make the system is a closed-loop feedback system. The total system is controlled by computer. The subject of study by the precision positioning system (hardware) from four components: optical system, positioning table and the stepping-driven, photo detector circuit, Operational control equipment. Established a software interface of the control system and a hardware PLC control system, after proposed the program of system. Use Borland C + + Builder 6.0 as a development tool developed a system of control interface. The underlying hardware equipment procedures for the control of the language PLC control procedures, and high-level language C language selection procedures, which require on a computer program to prepare for the C language to communicate with the PLC to PLC control program calls for stepping motor control of the movement , Which uses C-language programming procedures and PLC communications. The experimental result shows the device which based on Moore laser signal can perform a high positioning accuracy .The approaches are of high value for accelerating the advancement of precision manufacturing technology. This paper analyses on the subject of further research.
Key Words: Worktables, Precision position ,
Moor signals , Macro movement table ,
Micro movement table
目 录
中文摘要 Ⅰ
ABSTRACT Ⅱ
1.绪论.....................................................................1
1.1课题研究背景及意义......................................................1
1.2机械精密定位系统的应用领域...... .......................................1
1.2.1微型机械制造、超精密加工.......... .................................1
1.2.2生物工程方面.............. .........................................1
1.2.3集成电路制造方面........ ...........................................1
1.2.4光纤对接方面........................................................2
1.2.5微机械零件的操作和装配..............................................2
1.2.6医疗科学方面.........................................................2
1.3机械精密定位系统在国内外的研究现状.... ..................................2
2.定位系统的基本结构......... ..........................................4
2.1驱动方式.............. ..................................................4
2.2载物台.............. ....................................................4
2.3位移测量反馈系统....... .................................................5
2.4控制方式...................... ..........................................5
2.4.1人工控制........... .................................................5
2.4.2开环控制............. ...............................................6
2.4.3伺服反馈控制........... .............................................6
3.系统总体方案设计........... ..........................................7
3.1驱动与定位系统设计.......... ............................................7
3.1.1 定位台................... ..........................................8
3.1.2弹性解耦机构.............. ..........................................8
3.1.3 驱动部分................ ...........................................9
3.2 位置检测反馈系统............ ...........................................11
3.2.1 光栅配置............................................................11
3.2.2 光电检测电路设计........ ...........................................11
3.3控制系统................................................................15
3.3.1控制模型............ ...............................................15
3.3.2控制系统硬件......... ..............................................17
3.3.3控制系统软件..
摘 要
设计了一种大行程精密工作台定位控制系统。提出用直线音圈电机粗动控制与压电陶瓷精动控制相结合的方法来完成对工作台的定位控制，利用衍射干涉光栅技术进行实时检测，实现定位机构的全闭环反馈控制，最后由计算机完成系统总体控制。该课题所研究的精密定位系统（硬件部分）由四部分组成:光路系统、定位台与驱动机构、光电检测电路、运算控制设备。在提出系统方案的基础上，重点构建了控制系统的软件界面和基础硬件控制系统即PLC控制系统。运用Borland C++ Builder 6.0作为开发工具开发出了系统工作的控制界面。设备底层硬件控制的语言程序为PLC控制程序，高层语言程序选用C语言，而这需要在计算机上编写基本的程序实现C语言与PLC进行通信，来调用PLC控制程序实现对步进电机的运动控制，即用C语言程序编写程序与PLC通信。基于激光莫尔信号的精密定位装置可获得比较高定位精度，对精密加工等工程领域具有重要的实用价值最后,本文分析介绍了课题进一步的研究方向。
类键词: 工作台，精密定位，莫尔信号, 粗动台，微动台
ABSTRACT
This paper presents a system for long-work range Precisely positioning of the worktable. In the system ,the combination of Linear voice coil actuator for coarse adjusting and the PZT for fine adjusting is applied in positioning of the worktable while the diffraction interfere grating technique is utilized for the feedback of the positional signal real time. That make the system is a closed-loop feedback system. The total system is controlled by computer. The subject of study by the precision positioning system (hardware) from four components: optical system, positioning table and the stepping-driven, photo detector circuit, Operational control equipment. Established a software interface of the control system and a hardware PLC control system, after proposed the program of system. Use Borland C + + Builder 6.0 as a development tool developed a system of control interface. The underlying hardware equipment procedures for the control of the language PLC control procedures, and high-level language C language selection procedures, which require on a computer program to prepare for the C language to communicate with the PLC to PLC control program calls for stepping motor control of the movement , Which uses C-language programming procedures and PLC communications. The experimental result shows the device which based on Moore laser signal can perform a high positioning accuracy .The approaches are of high value for accelerating the advancement of precision manufacturing technology. This paper analyses on the subject of further research.
Key Words: Worktables, Precision position ,
Moor signals , Macro movement table ,
Micro movement table
目 录
中文摘要 Ⅰ
ABSTRACT Ⅱ
1.绪论.....................................................................1
1.1课题研究背景及意义......................................................1
1.2机械精密定位系统的应用领域...... .......................................1
1.2.1微型机械制造、超精密加工.......... .................................1
1.2.2生物工程方面.............. .........................................1
1.2.3集成电路制造方面........ ...........................................1
1.2.4光纤对接方面........................................................2
1.2.5微机械零件的操作和装配..............................................2
1.2.6医疗科学方面.........................................................2
1.3机械精密定位系统在国内外的研究现状.... ..................................2
2.定位系统的基本结构......... ..........................................4
2.1驱动方式.............. ..................................................4
2.2载物台.............. ....................................................4
2.3位移测量反馈系统....... .................................................5
2.4控制方式...................... ..........................................5
2.4.1人工控制........... .................................................5
2.4.2开环控制............. ...............................................6
2.4.3伺服反馈控制........... .............................................6
3.系统总体方案设计........... ..........................................7
3.1驱动与定位系统设计.......... ............................................7
3.1.1 定位台................... ..........................................8
3.1.2弹性解耦机构.............. ..........................................8
3.1.3 驱动部分................ ...........................................9
3.2 位置检测反馈系统............ ...........................................11
3.2.1 光栅配置............................................................11
3.2.2 光电检测电路设计........ ...........................................11
3.3控制系统................................................................15
3.3.1控制模型............ ...............................................15
3.3.2控制系统硬件......... ..............................................17
3.3.3控制系统软件..
